At first, during the synthesis process, chlorine and hydrogen is interacted to produce hydrogen chloride (or outsourcing HCl), then at a certain temperature, hydrogen chloride react with silicon powder to create trichlorosilane, after that, separate the trichlorosilane to purify it by distillation, at last, in hydrogen reduction furnace, the purified trichlorosilane goes through CVD reaction to produce high-purity polysilicon.

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