FBR method, under high temperature and high pressure, silicon tetrachloride, hydrogen, hydrogen chloride, and industrial silicon are introduced in a fluidized bed reactor as the raw materials to produce trichlorosilane (TCS); then the obtained TCS and hydrogen undergoes a series of chemical reaction to create dichlorosilane, and afterwards, silane gas is produced. The generated gas is sent forward to a reaction chamber, which contains small particles of silicon, a serial of thermal decomposition has been carried out, at last, the final products are small particles composed of granular polysilicon.


Add Comment